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Complete downloadable Solutions Manual for Silicon VLSI Technology Fundamentals Practice and Modeling 1st Edition by Plummer. INSTRUCTOR RESOURCE INFORMATION
TITLE: Silicon VLSI Technology Fundamentals Practice and Modeling
RESOURCE:Solutions Manual
EDITION: 1st Edition
AUTHOR: Plummer, Deal, Griffin
PUBLISHER: Pearson
Table of content
1. Introduction and Historical Perspective.
2. Modern CMOS Technology.
3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers.
4. Semiconductor Manufacturing Clean Rooms, Wafer Cleaning and Gettering.
5. Lithography.
6. Thermal Oxidation and the Si/SiO2 Interface.
7. Dopant Diffusion.
8. Ion Implantation.
9. Thin Film Deposition.
10. Etching.
11. Backend Technology.
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