Product Information

Complete downloadable Solutions Manual for Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices 2nd Edition by Jaeger. INSTRUCTOR RESOURCE INFORMATION
TITLE: Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices
RESOURCE:Solutions Manual
EDITION: 2nd Edition
AUTHOR: Jaeger
PUBLISHER: Pearson

Table of content

1. An Overview of Microelectronic Fabrication.
2. Lithography.
3. Thermal Oxidation of Silicon.
4. Diffusion.
5. Ion Implantation.
6. Film Deposition.
7. Interconnections and Contacts.
8. Packaging and Yield.
9. MOS Process Integration.
10. Bipolar Process Integration.
11. Processes for Microelectromechanical Systems—MEMS.

Loading...

Taking too long?

Reload document

| Open in new tab