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Complete downloadable Solutions Manual for Foundations of MEMS 1st Edition by Chang Liu. INSTRUCTOR RESOURCE INFORMATION
TITLE: Foundations of MEMS
RESOURCE:Solutions Manual
EDITION: 1st Edition
AUTHOR: Chang Liu
PUBLISHER: Pearson
Table of content
Chapter 1: Introduction
Chapter 2: Introduction to Microfabrication
Chapter 3: Review of Essential Electrical and Mechanical Concepts
Chapter 4: Electrostatic Sensing and Actuation
Chapter 5: Thermal Sensing and Actuation
Chapter 6: Piezoresistive Sensors
Chapter 7: Piezoelectric Sensing and Actuation
Chapter 8: Magnetic Actuation
Chapter 9: Summary of Sensing and Actuation
Chapter 10: Bulk Micromachining and Silicon Anisotropic Etching
Chapter 11: Surface Micromachining
Chapter 12: Polymer MEMS
Chapter 13: Microfluidics Applications
Chapter 14: Instruments for Scanning Probe Microscopy
Chapter 15: Optical MEMS
Chapter 16. MEMS Technology Management
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